Indentation measurements on thin films

نویسندگان

  • P. E. Wierenga
  • A. J. J. Franken
چکیده

Thin films have an important part to play in modern technology. It is difficult to characterize the mechanical properties of thin films because the films cannot usually be investigated separately from the substrate. One of the few methods that can be used for such investigations consists in making an indentation in the film by applying an extremely small and accurately controlled force while at the same time measuring the depth of indentation. The indentationtest machine that has been designed at Philips Research Laboratories in Eindhoven is capable of applying forces between 10 f1N and 50 mN. It can be used for measuring the ultramicrohardness of thin metal films and also for determining the visco-elastic properties of polymer films. Both quasi-static and dynamic measurements can be performed. Philips Tech. Rev. 42, No. 3, 85-92, Oct. 1985

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تاریخ انتشار 2014