Indentation measurements on thin films
نویسندگان
چکیده
Thin films have an important part to play in modern technology. It is difficult to characterize the mechanical properties of thin films because the films cannot usually be investigated separately from the substrate. One of the few methods that can be used for such investigations consists in making an indentation in the film by applying an extremely small and accurately controlled force while at the same time measuring the depth of indentation. The indentationtest machine that has been designed at Philips Research Laboratories in Eindhoven is capable of applying forces between 10 f1N and 50 mN. It can be used for measuring the ultramicrohardness of thin metal films and also for determining the visco-elastic properties of polymer films. Both quasi-static and dynamic measurements can be performed. Philips Tech. Rev. 42, No. 3, 85-92, Oct. 1985
منابع مشابه
Atomic Simulation of Temperature Effect on the Mechanical Properties of Thin Films
The molecular dynamic technique was used to simulate the nano-indentation test on the thin films of silver, titanium, aluminum and copper which were coated on the silicone substrate. The mechanical properties of the selected thin films were studied in terms of the temperature. The temperature was changed from 193 K to 793 K with an increment of 100 K. To investigate the effect of temperature on...
متن کاملMechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering
Crystalline tantalum thin films of about 500nm thickness were deposited on AISI 316L stainless steel substrate using magnetron sputtering. To investigate the nano-mechanical properties of tantalum films, deposition was performed at two temperatures (25°C and 200°C) on TaNx intermediate layer with different N2/Ar flow rate ratio from 0 to 30%. Nano-indentation was performed to obtain the mechani...
متن کاملDesign and investigation of TiO2 –SiO2 thin films on AISI 316L stainless steel for tribological properties and corrosion protection
The TiO2–SiO2 thin films were deposited on AISI 316L stainless steel via sol-gel method. Then, the effect of the added amount of SiO2 on the structure, morphology and mechanical properties of the films and corrosion behavior of AISI 316L stainless steel substrate were investigated. So, X-ray diffraction, field-emission scanning electron microscopy, atomic force microscopy, depth-sensing indenta...
متن کاملInfluence of aging temperature on phase transformation and mechanical behavior of NiTi thin films deposited by magnetron sputtering technique
In this study, NiTi thin films were deposited on the glass and NaCl substrates by means of magnetron sputtering method. The influence of aging temperature, over the range 300-500 oC, on phase transformation and mechanical properties of the sputtered NiTi thin films were studied by differential scanning calorimetry (DSC) and nano-indentation assay, respectively. The DSC curves showed that the ag...
متن کاملNano-indentation of Copper Thin Films on Silicon Substrates
Indentation methods are finding increasing use in the study of mechanical properties of bulk and thin-film materials over a wide range of size scales (e.g., [1,2]). With the increasing sophistication of instrumented, depth-sensing indentation equipment and of computational methods to model the deformation of materials subjected to indentation, there is growing interest in studying the elastopla...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2014